Reinhardt Kosellecks "Vergangene Zukunft" / "Futures Past" is a personal favourite. Highly recomended! The development of historical thinking, specifically political history. Iirc he might go into a slot of his own as "concept history".
For history of science there is the old fogey, but classic, Arthur Lovejoy and his conception of a "history of ideas" as something about "unit ideas", eternal concepts. Heavily outdated but one of these classic must reads. One can follow it up with almost as classic Butterfield's "The Whig Interpretation of History".
And more recently there has been a bit of a row between Steven Shapin, grandmaster of the social history of science, and collegues like John Heilbron less happy about the whole "social constructivism" thing, specifically over the status of this thing called "The Scientific Revolution".
Otherwise these days Michel Foucault would seem the historians' philosopher par excellence. Kind of hard to pin him down in a little conceptual box though, which was very much the point of most of what he wrote.